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PZT

Lead zirconate titanate (PZT) is a ceramic material which has piezo-electric properties (the material is electrally charged as a result of deformation/pressure). The most common application is for ultrasonic imaging in the medical industry. In most of the applications the PZT is diced vertically with series of shallow cuts.

Major Considerations:

  • Very tight kerf-width tolerances
  • Kerf perpendicularity
  • Wall breakage
  • Chipping
  • High exposure thickness ratio
  • Kerf shape


Saw:

7122 enhanced process control tools with very high automation level, high accuracy.

Blade:

  • 2″ Hub or Annular Nickel Blades 
  • Diamond grit size: 3 – 6 to 10 µm
  • Thickness: .0008” – .0030”      


Process Parameters:

  • Feed Rate: 1 – 6 mm/sec
  • Spindle speed: 20 – 30 krpm