7122
2", DC-brushless, 1.2 KW, front-mounted, air-bearing spindle (60 krpm Max.), with closed-loop turntable.
Optimized for multi-angle dicing of thin, tight tolerance products up to 200 mm x 200 mm, such as:
- Opto-electronic Components
- PCB BGA Panels
- High-brightness LED Packages
- Silicon Wafers
- SAW Filters
- Glass/Silicon Sensors
- MEMS
- PZT
System Specifications:
Work piece size: up to 200mm x 200mm
Blade size: 2"-3"
Spindle: Air-bearing, DC-brushless, 60 krpm/1.2 kW
High power 2.4 KW Spindle (optional)
Indexing Axis (y)
Drive: Ball bearing lead screw with stepper motor
Control: linear encoder
Resolution: 0.2 µm
Cumulative accuracy: 1.5 µm
Index accuracy: 1.0 µm
Feed Axis (x)
Air slide
Drive: Ball bearing lead screw with DC-brushless motor
Feed rate: up to 600 mm/sec
Cut Depth Axis (z)
Drive: Ball bearing lead screw with stepper motor
Resolution: 0.2 µm
Accuracy: 2.0 µm
Repeatability: 1.0 µm
Stroke: 50 mm
Rotary encoder
Z Liner Encoder – Optional
Z Clearance up to 3" - Optional
Rotary Axis (Ø)
Drive: closed-loop, direct drive, DC-brushless
Accuracy: 4 arc-sec
Repeatability: 4 arc-sec
Stroke: 350 deg.
Vision System
Digital camera, Fire-wire technology, Hight bright LED illumination (vertical & oblique)
Continuous digital magnification from x55 to x210 or from x35 to x140 (optional).
Utilities
Electrical: 200-240 VAC, 50/60 Hz, single phase
Air: 260 L/min @ 5.5 bar
Spindle coolant: 1.1 L/min tap water
Cutting water: up to 3 L/min
Dimensions (WXDXH)
965 x 1300 x 1600 mm
Weight: 900 kg