7220 Models

7223

2"-3" High-torque, DC-brushless, Air-bearing, 2.4 KW, 60 krpm spindle system, optimized for package singulation and IC applications.

System Specifications:

Workpiece size:

∅200, Package singulation – up to 212 x 142 mm

∅300, Package singulation – up to 245 x 234 mm 

Blade size: 2"-3"

Spindle: Air bearing, DC-brushless, 60 krpm, 2.4 KW

Indexing Axis (Y)

Drive: Ball bearing lead screw with stepper motor

Control: linear encoder

Resolution: 0.2 µm

Cumulative accuracy: 3 µm 

Indexing accuracy: 1.0 µm

Feed Axis (x)

Drive: Ball bearing lead screw with DC-brushless motor

Feed rate: up to 600 mm/sec

Cut Depth Axis (z)

Drive: Ball bearing lead screw with DC-brushless motor

Resolution: 0.2 µm

Accuracy: 2.0 µm

Repeatability: 1.0 µm

Rotary Axis (T)

Drive: closed-loop, direct-drive, DC-brushless

Accuracy: 4 arc-sec

Repeatability: 4 arc-sec

Stroke: 350 deg.

Vision System

Digital camera

High bright LED illumination (vertical & oblique)

Continuous digital magnification: from x70 to x280 or from x50 to x200 (optional) 

Cleaning Station

Full rinse and dry cycle

Spinning speed: 100-2500 RPM

High pressure: up to 10 MPa

Atomizing cleaning capabilities

Wafer Handling System

Slot to slot integrity

Inspection drawer

BBD (Broken Blade Detector)

ESD (Electrostatic Discharge) kit (optional)

UV curing station (optional)

Barcode reader (optional)

Dress station (optional)

SECS-GEM host communication (optional)

User Interface

Flat 17" touch screen

New graphical User Interface (NUI)

Multilanguage support

Keyboard & mouse

Utilities

Electrical: 200-240 VAC 50/60 Hz, Single phase

Air/N2: 700 L/min @ 5.5 bar

500 L/min compressed air, 200 L/min process air/ N2

Spindle coolant: 1.1 L/min tap water

Process Water (DI): Blade/process coolant - up to 7 L/min

                              High pressure cleaning - up to 5 L/min

Atomized cleaning: up to 0.15 L/min

High-pressure cleaning: up to 5 L/min (optional)

Dimensions (WxDxH):

∅200: 965 x 1460 x 1700 mm

Weight ∅200: 1200 kg

 

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