CONTACT
US

8020 - Fully automatic dicing saw


FEATURES & BENEFITS

  • Flexibility – Supports Hub and Hubless blades up to 3” O.D.
  • Spindles of 1.8 kW or 2.2 kW high power
  • Intuitive operation interface using a large 19” touch screen monitor
  • Fast & simple blade change
  • SECS / GEM platform ready

RELATED DOCUMENTS

TECHNICAL SPECIFICATIONS

Specifications8020
Workpiece SizeØ 8”
SpindleTwo facing 1.8 kW or 2.2 kW,
max. 60,000 rpm
Blade Size2” – 3”
Y1/Y2 AxisControl
Resolution
Cumulative Accuracy
Indexing Accuracy
Linear encoder for each Y axis
0.1 µm
1.5 µm
1.0 µm
210 mm
X AxisAir Slide
Z1 / Z2 AxisResolution
Repeatability
0.2 µm
1.0 µm
30 mm (for 2.188” blade OD)
Θ AxisRepeatability
Stroke
4 arc-sec
380°
Cleaning Station

Spinning speed Cleaning
Method
Full rinse and dry cycle
100-3,000 rpm
Atomized cleaning capabilities
UtilitiesElectrical200-240 VAC, 50/60 Hz, single phase
Dimensions(W x D x H) mm
Weight
1820 × 1460 × 1015
1,300kg

MATERIALS

  • Silicon wafers / discrete devices
  • Silicon carbide (SiC)
  • MEMS
  • SAW devices
  • Glass wafer
  • Packaging (QFN, LED…)