CONTACT
US

71TS


FEATURES & BENEFITS

  • Will support standard dicing and tilted dicing
  • Quick changeover from perpendicular (0°) to any angle up to 15°
  • Dedicated programmable work stations for both angular settings
  • Field fine adjustment capability
  • 0.1° angular repeatability
  • 0.1° angular resolution
  • Two preset angles:
    – First angle at 0˚
    – Second angle at 0˚C-15˚
    – Fine angle adjust capability

RELATED DOCUMENTS

   Dicing Saws

   71TS

TECHNICAL SPECIFICATIONS

Specifications71TS
Workpiece SizeØ 8”
Spindle60K rpm / 1.8 kW or 2.2kW
Blade Size2” – 3”
Y AxisControl
Resolution
Cumulative Accuracy
Indexing Accuracy
Linear encoder
0.1 µm
1.5 µm
1.0 µm
X AxisAir Slide
Z AxisResolution
Repeatability
0.2 µm
1.0 µm
Θ AxisRepeatability
Stroke
4 arc-sec
380°
UtilitiesElectrical200-240 VAC, 50/60 Hz, single phase
Dimensions(W x D x H) mm
Weight
965 × 1300 × 1600
900kg

MATERIALS

Planar Wave Guides:

  • Silicon, Silica-on Silicon InP
  • Fiber Wave Guides
  • Fused Silica
  • Polymers on Si
  • GaAs
  • LiNbO3

Fiber Wave Guides:

  • SOI, SIO
  • LiNbO3
  • Fused Silica