ADT will discontinue the sale of the 974,976,975 Substrate Cleaning Systems effective 12/Dec/2011.

The discontinued 974 / 976 / 975 are replaced by the new improved 977 8” or 12” Wafer Cleaning system.

ADT will provide five years support program for the 974,976,975 Substrate Cleaning Systems. This program goal is to provide 974,976,975 customers with the Service and parts support needed to keep their machines in operation.

New 974,976,975 Series Sales

New 974,976,975 sales will not be available.

New Accessories and Options

ADT will continue the sales of standard accessories, options and retrofit kits to customers that use the 974,976,975.

Those accessories and Option will be available for sales for Limited 1 year, until Jan 1, 2013. Prices of accessories and options for the 974,976,975 may be increased after Jan 1, 2013 due to reduced purchasing quantities.

ADT at its discretion may not accept an order for a special accessory or option to an installed 974,976,975 machines.

Field Service Support

ADT will provide field service support for the 974,976,975 standard product line through Jan 1, 2017. The 974,976,975 -service support program will include:

  • Through Jan 1, 2017 ADT service will continue to provide routine maintenance and repair of all 974,976,975 Series (this may be limited by spare parts availability).

If you have any question about the kind of service support that will be available for your 974,976,975, please contact your regional service manager.

Spare Parts Support

ADT will sell standard 974,976,975 spare parts through Jan 1, 2017.

ADT may, at its discretion:

  • Sell available spare parts from stock, or;
  • Where feasible, recommend and sell substitute parts or conversion kits.

Prices of spare parts for the 974,976,975 may be increased after Jan 1, 2012 due to reduced purchasing quantities.


All standard 974,976,975 documentation will be available through Jan 1, 2017.