CO2 Injector (CO2 Bubbler) 947
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High quality processing, contamination-free devices
ADT 947 CO2 Inline Injector (CO2 Bubbler) is designed to eliminate particle adhesion and device damage caused by electrostatic effects. The units dissolve CO2 gas into de-ionized water (DI) used for dicing or cleaning processes, thus performing consistent control over an optimal level of resistivity.
System Highlights:
- 2 Line display, monitoring and alarms
- Resistivity target and range setting
- Resistivity / Conductivity units display
- Dicing Communication (will be avaiable soon)
Technical Specifications:
Water capacity | 3-10 liter/min |
Set point range | 0.5 MΩ – 1 MΩ |
Line voltage | 110/220 V 50 Hz or 60 Hz |
Dimensions (WxHxD) | 190 x 446 x 365mm |
Aprox. weight | 10 kg |