半自動雙軸 - ADT - Advanced Dicing Technologies https://www.adt-co.com/zh-hant/dicing_saw_cat/automatic-twin-spindle-zh-hant/ Advanced Dicing Technologies, Dicing Saws, Blades Mon, 27 Jul 2026 07:27:50 +0000 zh-TW hourly 1 https://wordpress.org/?v=7.1.3 https://www.adt-co.com/wp-content/uploads/2023/07/cropped-android-chrome-96x96-1-32x32.png 半自動雙軸 - ADT - Advanced Dicing Technologies https://www.adt-co.com/zh-hant/dicing_saw_cat/automatic-twin-spindle-zh-hant/ 32 32 8001 https://www.adt-co.com/zh-hant/dicing_saw/wafer-eraser/8001-2/ Sun, 17 May 2026 11:29:01 +0000 https://www.adt-co.com/?post_type=dicing_saw&p=9565 CO2 Laser Ablation

Precision Material Removal with

Minimal Thermal Impact

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FEATURES & BENEFITS

A Shuttle or Multi-Project Wafer (MPW) is a service model where multiple customers share the cost of a single mask set and wafer run to create prototype chips. ADT addresses this need with the 8001 Eraser, designed specifically to support shuttle fab services.

Maximize shuttle wafer efficiency with precise, low-impact CO2 laser ablation.

CO2 Laser Scribing Module Features

• 10.6 μm CO2 laser head • Typical 50-60 μm spot size • Adjustable power by PWM method • Precision motion system • Real-time process monitoring

Key Advantages of ADT CO2 Laser

• Laser energy is absorbed mainly by the patch material, minimizing silicon substrate damage while delivering precise removal
• Efficient removal of metals and non-Si materials
• Reduced laser penetration into silicon
• Lower risk of micro-cracks in silicon

Process Enhancements

1. Integrated pre-coating cycle
2. Post-process washing and drying for wafer protection, cleanliness, and process stability
3. High-power exhaust particle extraction removes debris immediately during laser ablation

RELATED DOCUMENTS

   Dicing Saws Catalog
  8001 Brochure

Thermal Laser Power Monitoring

The 8001 system includes a built-in thermal laser power sensor to measure the emitted laser power in real-time. This ensures that the software-set power aligns with the actual laser output, enabling
stable production and consistent quality.

TECHNICAL SPECIFICATIONS

SpecificationsValue
Work piece SizeUp to Ø 300 mm
LaserCO2 CW water cooled 4 L/Min
Power60W
Indexing Axis (Y)
Resolution
Accuracy Cumulative
Accuracy Indexing
0.2 μm
1.5 μm
1.0 μm
Feed Axis (X)
Drive
Ball bearing lead screw with DC-brushless motor
Cut Depth Axis (Z)
Resolution		USB3 camera, High bright LED illumination (vertical & oblique)
0.2 μm
Rotary Axis (T)
Accuracy

Standard
4 arc-sec (0.001 deg.)
CE Certification by default
Semi-S2 as an option
Utilities*
Electrical

Laser coolant
Dimensions
Weight		200-240 VAC 50/60 Hz Single Phase
2000W
4 L/min
1100 X 1740 X 1700 mm
1350 Kg

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]]> 7930 DUO https://www.adt-co.com/zh-hant/dicing_saw/automatic-dicing-saws/7930-duo/ Sun, 21 May 2023 12:59:45 +0000 https://www.adt-co.com/dicing_saw/automatic-dicing-saws/7930-duo/ 最大可搭配 12寸 x 10 寸及12吋圓盤的產品

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特點與優勢

  • 適用於直徑達12″x10″的夾具
  • ‘X’軸空氣軸承，實現平穩運動和超高切割品質
  • 具備高解析度光學的自動化
  • 多層基板切割
  • 客製化製程解決方案

相關文件

   Dicing Saws Catalog
  7930 Duo

技術規格

Specifications7930 Duo
Workpiece Size12" × 10" or Ø 12"
SpindleTwo facing 1.8 kW or 2.2 kW,
max. 60,000 rpm
Blade Size2" - 3"
Y1/Y2 AxisControl
Resolution
Cumulative Accuracy
Indexing Accuracy		Linear encoder for each Y axis
0.1 µm
1.5 µm
1.0 µm
X AxisAir Slide
Z1 / Z2 AxisResolution
Repeatability
Stroke		0.2 µm
1.0 µm
30 mm (for 2.188" blade OD)
Θ AxisRepeatability
Stroke		4 arc-sec
380°
UtilitiesElectrical200-240 VAC, 50/60 Hz, single phase
Dimensions(W x D x H) mm
Weight		875 X 975 X 1450
900 kg

材料

  • 矽晶圓 / 分立元件
  • 硅碳化物（SiC）
  • MEMS
  • SAW設備
  • 玻璃晶圓
  • 封裝（QFN、LED等）

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]]> 7920 DUO https://www.adt-co.com/zh-hant/dicing_saw/automatic-dicing-saws/7920-duo/ Sun, 21 May 2023 12:33:03 +0000 https://www.adt-co.com/dicing_saw/automatic-dicing-saws/7920-duo/ 最大可搭配 10寸 x 10 寸的產品

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特點與優勢

  • 適用於直徑達10″x10″的夾具
  • ‘X’軸空氣軸承，實現平穩運動和超高切割品質
  • 具備高解析度光學的自動化
  • 多層基板切割
  • 客製化製程解決方案

相關文件

   Dicing Saws Catalog
  7920 Duo

技術規格

Specifications7920 Duo
Workpiece Size10" × 10"
SpindleTwo facing 1.8 kW or 2.2 kW shaft lock spindles, max. 60,000 rpm
Blade Size2" - 3"
Y1/Y2 AxisControl
Resolution
Cumulative Accuracy
Indexing Accuracy		Linear encoder for each Y axis
0.1 µm
1.5 µm
1.0 µm
X AxisAir Slide
Z1 / Z2 AxisResolution
Repeatability
Stroke		0.2 µm
1.0 µm
30 mm (for 2.188" blade OD)
Θ AxisRepeatability
Stroke		4 arc-sec
380°
UtilitiesElectrical200-240 VAC, 50/60 Hz, single phase
Dimensions(W x D x H) mm
Weight		875 X 975 X 1450
900 kg

材料

  • 矽晶圓 / 分立元件
  • 硅碳化物（SiC）
  • MEMS
  • SAW設備
  • 玻璃晶圓
  • 封裝（QFN、LED等）

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]]> 7900 DUO https://www.adt-co.com/zh-hant/dicing_saw/automatic-dicing-saws/7900-duo/ Sun, 21 May 2023 12:29:28 +0000 https://www.adt-co.com/dicing_saw/automatic-dicing-saws/7900-duo/ 最大可搭配 8 寸 x 8 寸的產品

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特點與優勢

  • 適用於直徑達10″x10″的夾具
  • ‘X’軸空氣軸承，實現平穩運動和超高切割品質
  • 具備高解析度光學的自動化
  • 多層基板切割
  • 客製化製程解決方案

相關文件

   Dicing Saws Catalog
  7900 Duo 

技術規格

Specifications7900 Duo
Workpiece SizeØ 8”
SpindleTwo facing 1.8 kW or 2.2 kW shaft lock spindles, max. 60,000 rpm
Blade Size2" - 3"
Y1/Y2 AxisControl
Resolution
Cumulative Accuracy
Indexing Accuracy		Linear encoder for each Y axis
0.1 µm
1.5 µm
1.0 µm
X AxisAir Slide
Z1 / Z2 AxisResolution
Repeatability
Stroke		0.2 µm
1.0 µm
30 mm (for 2.188" blade OD)
Θ AxisRepeatability
Stroke		4 arc-sec
380°
UtilitiesElectrical200-240 VAC, 50/60 Hz, single phase
Dimensions(W x D x H) mm
Weight		875 X 975 X 1450
900 kg

材料

  • 矽晶圓 / 分立元件
  • 硅碳化物（SiC）
  • MEMS
  • SAW設備
  • 玻璃晶圓
  • 封裝（QFN、LED等）

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