Dosing Pump

Dosing Pump with Integrated 25L Tank
High-Precision, Integrated Solution for Semiconductor Dicing Process

Product Description
A mobile, compact, and intelligent dosing pump system, specifically designed for seamless integration with ADT dicing equipment. The system ensures precise additive delivery and real-time monitoring, improving process reliability and automation.

Technical Specifications
Max. Discharge Capacity: 38 mL/min
Discharge per Shot: 0.05 to 0.11 mL/shot
Max. Discharge Pressure: 1.0 MPa
Hose Connection: 8 mm to 12 mm diameter
Power Supply: AC 100 to 240V, 50/60 Hz, single phase

Key Features
25-liter integrated tank
Built-in dosing pump with local control panel
Mobile platform – usable outside the dicing equipment
Automatic alarm through ADT software when additive runs out
Robust build, ideal for cleanroom environments
AS an option can control the dosing pump (%)per reccepie