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PZT Dicing

PZT DICING

Lead zirconate titanate (PZT) is a ceramic material which has piezo-electric properties (the material is electrally charged as a result of deformation/pressure). The most common application is for ultrasonic imaging in the medical industry. In most of the applications the PZT is diced vertically with series of shallow cuts.

Major PZT Dicing Considerations:

  • Very tight kerf-width tolerances
  • Kerf perpendicularity
  • Wall breakage
  • Chipping
  • High exposure thickness ratio
  • Kerf shape


Dicing Saw:

7122 dicing saw by ADT – enhanced process control tools with very high automation level, high accuracy.

Dicing Blade:

  • 2″ Hub or Annular Nickel Blades 
  • Diamond grit size: 3 – 6 to 10 µm
  • Thickness: .0008” – .0030”      


Dicing Process Parameters:

  • Feed Rate: 1 – 6 mm/sec
  • Spindle speed: 20 – 30 krpm
PZT Dicing