Lead zirconate titanate (PZT) is a ceramic material which has piezo-electric properties (the material is electrally charged as a result of deformation/pressure). The most common application is for ultrasonic imaging in the medical industry. In most of the applications the PZT is diced vertically with series of shallow cuts.

Major Considerations:

• Very tight kerf-width tolerances
• Kerf perpendicularity
• Wall breakage
• Chipping
• High exposure / thickness ratio
• Kerf shape

Saw:

7122 enhanced process control tools with very high automation level, high accuracy.

Blade:

• 2″ Hub or Annular Nickel Blades 
• Diamond grit size: 3 – 6 to 10 µm
• Thickness: .0008” – .0030”      

Process Parameters:

• Feed Rate: 1 – 6 mm/sec
• Spindle speed: 20 – 30 krpm