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CO2 INJECTOR (CO2 BUBBLER) 947, AB-47

High quality processing, contamination-free devices
ADT 947 CO2 Inline Injector is designed to eliminate particle adhesion and device damage caused by electrostatic effects. The units dissolve CO2 gas into de-ionized water (DI) used for dicing or cleaning processes, thus performing consistent control over an optimal level of resistivity.

RELATED DOCUMENTS

FEATURES & BENEFITS​

  • Online monitoring and alarms
  • Resistivity target and range setting
  • Resistivity / Conductivity units display
  • Dicing Communication

TECHNICAL SPECIFICATIONS

947AB-47
Water capacity3-10 liter/min7-20 liter/min
Set point range 0.5 MΩ – 1 MΩ0.5 MΩ – 1 MΩ
Line voltage110/220 V 50 Hz or 60 Hz110/220 V 50 Hz or 60 Hz
Dimensions (WxHxD)190 x 446 x 365mm190 x 492x 447mm
Approx. machine weight10 kg12 kg