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7132 - Automatic dicing saw


FEATURES & BENEFITS

  • ‘X’ axis air bearing for smooth motion and super cut quality
  • Automation with high resolution optics
  • Multi panel dicing
  • Custom process solution

RELATED DOCUMENTS

   Dicing Saws

  7132

 

TECHNICAL SPECIFICATIONS

Specifications7132
Workpiece SizeØ 12” or 300x300 mm W/O frame
Spindle60K rpm / 1.8 kW or 2.2KW
Blade Size2” – 3”
Y AxisControl
Resolution
Cumulative Accuracy
Indexing Accuracy
Linear encoder
0.1 µm
1.5 µm
1.0 µm
X AxisAir Slide
Z AxisResolution
Repeatability
0.2 µm
1.0 µm
Θ AxisRepeatability
Stroke
4 arc-sec
380°
UtilitiesElectrical200-240 VAC, 50/60 Hz, single phase
Dimensions(W x D x H) mm
Weight
965 × 1300 × 1600
900 kg

MATERIALS

  • Glass
  • PZT
  • LED & LED on PCB Packages
  • Opto-electronic Components
  • Sensors & MEMS
  • IC Wafers
  • Ceramic Substrates & Capacitors
  • Automotive Sensors 
  • Glass on Silicon
  • Package Singulation (BGA, QFN)
  • SAW Filters
  • LTCC