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7930 DUO - Automatic dicing saw


FEATURES & BENEFITS

  • Up to 12″ X 10″ chuck
  • ‘X’ axis air bearing for smooth motion and super cut quality
  • Automation with high resolution optics
  • Multi panel dicing
  • Custom process solution

RELATED DOCUMENTS

TECHNICAL SPECIFICATIONS

Specifications7930 Duo
Workpiece Size12" × 10" or Ø 12"
SpindleTwo facing 1.8 kW or 2.2 kW,
max. 60,000 rpm
Blade Size2" - 3"
Y1/Y2 AxisControl
Resolution
Cumulative Accuracy
Indexing Accuracy
Linear encoder for each Y axis
0.1 µm
1.5 µm
1.0 µm
X AxisAir Slide
Z1 / Z2 AxisResolution
Repeatability
Stroke
0.2 µm
1.0 µm
30 mm (for 2.188" blade OD)
Θ AxisRepeatability
Stroke
4 arc-sec
380°
UtilitiesElectrical200-240 VAC, 50/60 Hz, single phase
Dimensions(W x D x H) mm
Weight
875 X 975 X 1450
900 kg

MATERIALS

  • Silicon wafers / discrete devices
  • Silicon carbide (SiC)
  • MEMS
  • SAW devices
  • Glass wafer
  • Packaging (QFN, LED…)