80Ai – Introducing the 80Ai Dicing System
Fully automatic dual-spindle system supporting blades up to 3" OD. Capable of processing products up to 10...
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71MD
FEATURES & BENEFITS
- Low-vibration spindle plus monitoring options
- Advanced height measurement capabilities
- Z linear Encoder
- Unique, Integrated balancing software
- PZT Wall Thickness Measurement
RELATED DOCUMENTS
TECHNICAL SPECIFICATIONS
| Specifications | 71MD | |
| Workpiece Size | Ø 8” | |
| Spindle | 60K rpm / 1.8 kW | |
| Blade Size | 2” – 3” | |
| Y Axis | Control Resolution Cumulative Accuracy Indexing Accuracy | Linear encoder 0.1 µm 1.5 µm 1.0 µm |
| X Axis | Air Slide | |
| Z Axis | Resolution Repeatability | 0.2 µm 1.0 µm |
| Θ Axis | Repeatability Stroke | 4 arc-sec 380° |
| Utilities | Electrical | 200-240 VAC, 50/60 Hz, single phase |
| Dimensions | (W x D x H) mm Weight | 965 × 1300 × 1600 900kg |
MATERIALS
Glass
PZT
LED & LED on PCB Packages
- Sensors & MEMS
Opto-electronic Components
IC Wafers
- Automotive Sensors
Ceramic Substrates & Capacitors
Glass on Silicon
LTCC
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- Package Singulation (BGA, QFN)
