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7152

Up to 200 mm X 200 mm, Ø 200 mm
PZT, Crystal, Glass, Ceramic

7132

Up to 12” round product
12” X 9” square substrates with frame or 12” X 12” chuck without frame
PCB, QFN and BGA Panels, highbrightness, LED packages, 12” and 8” Silicon Wafers, SAW Filters

7122

Up to 8″ x 8″ products
Silicon wafers, thin-film devices, high-brightness LED, packages, SAW Filters, glass/ silicon sensors, PZT and more