7152
Up to 200 mm X 200 mm, Ø 200 mm
PZT, Crystal, Glass, Ceramic
7132
Up to 12” round product
12” X 9” square substrates with frame or 12” X 12” chuck without frame
PCB, QFN and BGA Panels, highbrightness, LED packages, 12” and 8” Silicon Wafers, SAW Filters
7134
Up to 12” round product,
12” X 9” square substrates
with frame or 12” X 12”
chuck without frame
Ceramic substrates, Alumina, Hybrids, Thick film devices and more
7124
up to 8″ x 8″ products
Ceramic substrates, Alumina, Hybrids,
Thick film devices and more
7122
Up to 8″ x 8″ products
Silicon wafers, thin-film devices, high-brightness LED, packages, SAW Filters, glass/ silicon sensors, PZT and more
