8020 - 全自動切割機
特點與優勢
- 靈活性 – 支援有輪轂及無輪轂刀片，直徑可達3吋
- 主軸功率高達1.8 kW或2.2 kW
- 使用大尺寸19吋觸控屏幕的直觀操作介面
- 快速且簡便的換刀過程
- SECS / GEM平台就緒
相關文件
技術規格
| Specifications | 8020 | |
| Workpiece Size | Ø 8” | |
| Spindle | Two facing 1.8 kW or 2.2 kW, max. 60,000 rpm |
|
| Blade Size | 2” – 3” | |
| Y1/Y2 Axis | Control Resolution Cumulative Accuracy Indexing Accuracy | Linear encoder for each Y axis 0.1 µm 1.5 µm 1.0 µm 210 mm |
| X Axis | Air Slide | |
| Z1 / Z2 Axis | Resolution Repeatability | 0.2 µm 1.0 µm 30 mm (for 2.188” blade OD) |
| Θ Axis | Repeatability Stroke | 4 arc-sec 380° |
| Cleaning Station | Spinning speed Cleaning Method | Full rinse and dry cycle 100-3,000 rpm Atomized cleaning capabilities |
| Utilities | Electrical | 200-240 VAC, 50/60 Hz, single phase |
| Dimensions | (W x D x H) mm Weight | 1820 × 1460 × 1015 1,300kg |
材料
- 矽晶圓片 / 分離元件
- 碳化矽 (SiC)
- 微機電系統 (MEMS)
- 表面聲波 (SAW) 器件
- 玻璃晶圓
